The Eagles goalkeeper did not have an awful lot to do on the night, in truth, but after a decent save from Pogba's header, he was eventually beaten by Tevez.
The Argentine centre-back opened the scoring after just three minutes and was solid defensively throughout.
Showed plenty of energy to motor down the left when Benfica counterattacked, but, at times, he left too much space for Lichtsteiner and Pogba to exploit.
The towering Brazilian had an impressive evening as he dominated the game aerially at the back. However, he could have done more to keep out Tevez's goal.
Was fully-committed throughout, making some well-judged challenges and also pushing up to support his side when attacking.
Started the game brightly, with a few surging runs through midfield. His distribution was impressive but at times left the defence exposed.
Sat in front of the defence but did not limit the space for the Juventus runners between the lines enough. He was forced into some late, clumsy challenges.
A tireless performance from the Serbian, as he regularly found space on the left flank to trouble the Juve defence. He tracked back to defend but his influence decreased with time.
The Spaniard continued with his impressive recent form in the competition. He supplied some excellent early crosses from the left flank.
Came into the side at the expense of Lima and failed to vindicate his manager's decision with a rather ineffectual performance.
An exceptionally dynamic performance from the midfielder as he made a number of charging runs through the middle when Benfica broke.
Could perhaps have done more to keep Garay's header out of the bottom corner in the third minute. After that he was comfortable, particularly with the ball at his feet.
Was particularly positive on the right, which was Juve's main source of danger on the night. He made some clever runs in behind the defence.
The Italy international made a number of last-ditch challenges and interceptions, but he wasted a great chance to equalise in the final moments.
Looked vulnerable on the counterattack at times but regularly put in strong challenges to bring the Benfica attacks to a close after their bright start.
Defended poorly on the opener, not even challenging Garay to the header which resulted in the first goal. It seemed to knock his confidence for the remainder of the game.
The Ghanaian had a rather quiet evening on the left flank, creating very little until picking out Tevez to slot home the equaliser.
Found it difficult to stamp his mark on the game as he was closed very quickly in midfield. His deliveries from set plays were often disappointing.
The Italy international put a couple of decent balls into the box but he was unable to help Juve assert their dominance in the centre of the park and missed a great chance to equalise at the death.
Combined well with Lichtsteiner down the right, regularly spinning into space. He drew a save out of Artur in the second half with a decent header and was one of Juve's best performers.
The Argentine worked exceptionally hard for his team and was always looking to test Artur. He did eventually find the back of the net in the second half with a sublime finish to earn his side a priceless away goal.
Did not time his runs well enough and was caught offside on a number of occasions. He did not get into goalscoring areas frequently enough.
Replaced Andre Gomes in the 82nd minute and played a role in the winner with a lovely dummy.
Came on for Sulejmani in the 60th minute but was unable to offer more protection down his side's left.
The Brazilian replaced Cardozo in the 62nd minute and had the perfect impact, netting a fantastic strike late on to secure the win.