A frustrating night for the goalkeeper, who watched his team-mates struggle in attack, but could do little to help for most of the match. Quick off his line when he had to be, and dealt well with the minimal danger that came his way.
Very rarely put in a position to make a key intervention, but there were times when play started to open up and he was forced to react quickly. Following a fourth flawless performance, he has to be in the running for the label of Euro 2012's best player.
Offered little going forward, but his value was meant to be felt in defence. Nullified Samaras for most of the game, but in failed in two critical instances, each of which led to a Greece goal.
Like Hummels, had little to do in defence. Was caught away from Salpingidis once, but bailed out by Neuer. Otherwise kept things tidy at the back.
It was a frustrating evening for the Germans until the end of the first half, when the captain delivered the critical goal that opened up the game. A critical moment for the captain, whose leadership has in the past come into question.
Delivered some very nice passes, but as in recent games, he struggled to make an impact in the final third. Had a good chance to break the deadlock midway through the first half, but fired straight at Sifakis.
Another tidy display from the Real Madrid man. Stung Sifakis' hands with a couple strong shots, and played Reus through on goal in one instance. Came up aces in the second half as he volleyed home to make it 2-1.
Had everything but a goal in the first half - helped Ozil with the playmaking and came close to hitting the target a couple of times. Finally claimed his goal as he volleyed home an excellent strike.
A poor game by the vice-captain's lofty standards. Misplaced too many passes, and showed Katsouranis the way towards goal after needlessly conceding possession.
Had trouble imposing himself early, but became more influential after the opener. Torosidis couldn't handle his inside runs, and the Leverkusen man three times came close to curling in a goal before half-time.
Was never going to win the physical battle or be afforded much space in the box, but played within his means. Delivered a few simple touches and flicks that connected nicely with the wingers. Came to life when the game opened up in the second half, and scored with a fine header.
Had a bit of a nightmare as he fumbled a couple shots before failing to keep out Lahm's goal, which could have been saved. His woes compounded later as he was in no-man's land as Klose made it 3-1.
The Frankfurt man did well to contain Reus in wide areas, but was replaced at half-time. Greece's real problem, it should be noted, was in the interior.
The better of the centre-backs, the Bremen man was not particularly at fault for any goal , and made some aggressive challenges.
Guarded his area well at 0-0, but when the game began to open up, he struggled to contain Schurrle.
Did enough in defence when the score was 0-0, but things soon fell apart for the Schalke man. Beaten to a header as Klose scored, then out-run by the aging striker before Reus' goal.
Held his territory well early, but was caught out of position as Germany counter-attacked in the second half. Caught napping as Khedira stepped in front of him to score.
The captain showed real leadership at 0-0 as he ran hard and defended very well, even in his own box. Surprised Schweinsteiger as he won the ball in his attacking half, but then could make nothing of his chance.
Never had a chance in attack and could not contain Lahm - hooked at half-time.
Played almost like a centre-back early, but had no choice but to move forward once Greece fell behind, and this was when his deficiencies were exposed. Forced to play more forward, he was caught out often.
Always aggressive, the Celtic man served as a second left-back for long spells. He waited patiently for his chance to strike, and took it as he scored the vital equaliser.
Had no joy in the centre as a lone striker with little service. Found a way to involve himself in wide areas, however - he intelligently darted behind Lahm before assisting the equaliser at 1-1. Coolly struck home the late penalty, as well.