Goals from Miroslav Klose, Toni Kroos and Thomas Muller sealed a comfortable win for Joachim Low's side and moved them to within touching distance of Brazil 2014.
New Arsenal signing Ozil was thrilled to secure three points - and bragging rights - against their neighbours.
|9/2||Germany are 9/2 with BetVictor to win the World Cup in Brazil this summer
"Austria teased us prior to the game, but out on the pitch, we showed them who's boss..."
Captain Philipp Lahm was thrilled to claim maximum points against a side still vying for a qualification spot themselves, but warned his team-mates to maintain their efforts against Faroe Islands next week.
"It's great to win against the [then] group runners-up. We allowed little in behind and also played some very creative football going forward to score the goals. We've done well this week, but we have to keep working hard..." Lahm added.
Thomas Muller sealed the win with a late strike after setting up Klose's early goal which drew him level with Gerd Muller on the Germany all-time scorers' list with 68 goals.
The Bayern Munich star admitted he was delighted to contribute to the result.
"It feels very good. It's nice to have made two goals. We would all have taken 3-0 before the game. We must now continue to play consistently," said Muller.
Germany sit five points clear of Sweden at the top of Group C after Friday's round of fixtures.