Germany produced a remarkable result on Tuesday, with Toni Kroos and Andre Schurrle scoring twice and Thomas Muller, Miroslav Klose and Sami Khedira all adding to the tally as they stunned the hosts in Belo Horizonte.
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"We have great feelings and great emotions, we have won and we will play the final," the 54-year-old said.
"It's a good feeling, now we will have to be humble and prepare well for the final and take the next step.
"We know how good the Brazilian team are. It's a big result but doesn't reflect the difference in the two teams. Today was our day and we are happy to be in the final.
"They tried to show a reaction at the end and please their fans. There is happiness in the dressing room but we won't be going over the top.
"It will be important now for the players to recover, regain their strength. We will remain calm. The team is calm and there is no euphoria in the dressing room. It's going to be difficult in the final, but we will be focused and concentrated on our objective over the next few days."
Low also expressed his sympathy with the Selecao, likening their dismal defeat to Germany's semi-final loss to Italy in 2006 when they hosted the tournament.
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"They have magnificent players, but in a semi-final if you get so many goals against you it's very hard. They were getting nervous and playing long balls into our defence.
"I think I can imagine what was felt by the Brazilians. In 2006, in our home country, we missed the opportunity to make the final.
"It was a big disappointment for us and it's the same for any country. This defeat for Brazil will be difficult to digest. Brazil organised a sensational World Cup, has fantastic, friendly people - and it will be difficult to digest for them."
Finally, the Nationalelf boss paid tribute to striker Miroslav Klose, who became the all-time World Cup top scorer with his goal.
"What Klose has achieved is something really great, the most goals in the history of the World Cup," he added.
"He really deserves it and at his age he is still playing at the highest level. He is still dangerous and still scores goals. The only one who will beat him now is Muller - and that's a great thing for me and for the team."